Thin Film Thickness / Rate Measurement
QPM60 – TFT THIN FILM THICKNESS AND RATE MONITOR / CONTROLLER
As alternative to PC based monitor, EDF offers rack mounted monitor. The QPM60 multi channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control.
QPM comes in 3 versions:
QPM60-2C | QPM60-4C | QPM60-6C | |
Enclosure Dimensions [mm] | 520 x 286 x 550 – 2U standard | 520 x 286 x 550 – 2U standard | 520 x 286 x 550 – 2U standard |
Weight [netto] | 1.6 kg | 1.6 kg | 1.6 kg |
User Interface | 4.3” Colour TFT and rotary encoder | 4.3” Colour TFT and rotary encoder | 4.3” Colour TFT and rotary encoder |
Communication interface | RS232 and EthernetIP * | RS232 and EthernetIP * | RS232 and EthernetIP * |
Inputs channels | 2 | 4 | 6 |
Resolution | 0.01 Hz ** | 0.01 Hz ** | 0.01 Hz ** |
Thickness resolution | 0.012 A ( density = 1) | 0.012 A ( density = 1) | 0.012 A ( density = 1) |
Hardware interfaces | D/A and RS232 interface fully compatible to SQM160: 6 programmable analogue outputs for rate, 4 digital inputs (5V); 4 relay outputs thickness recording or power control ( via 4 x programmable BNC outputs ) |
D/A and RS232 interface fully compatible to SQM160: 6 programmable analogue outputs for rate, 4 digital inputs (5V); 4 relay outputs thickness recording or power control ( via 4 x programmable BNC outputs ) |
D/A and RS232 interface fully compatible to SQM160: 6 programmable analogue outputs for rate, 4 digital inputs (5V); 4 relay outputs thickness recording or power control ( via 4 x programmable BNC outputs ) |
* Ethernet for future firmware development
** each channel requires external oscillator model QM20-EO
QM20 – PC BASED THIN FILM THICKNESS AND RATE MONITOR
EDFelectronics offers so called PC based thickness rate monitors QM20 series, which combine the functionality of an oscillator and measurement converter. All monitors are installed between sensor head and superior control unit (e.g. PC or PLC) on atmosphere. The transducer delivers information about quartz frequency, rate, thickness and crystal health via a serial line like RS232, RS485, USB or PoE QM20 series are available with standard and high resolution.
This QM20 comes in 8 versions:
QM20-2-S | QM20-2-H | QM20-4-S | QM20-4-H | QM20-U-S | QM20-U-H | QM20-E-S | QM20-E-H | |
Interface | RS-232 | RS-232 | RS-232 | RS-232 | RS-232 | RS-232 | RS-232 | RS-232 |
Resolution (@ 6MHz) | 0.1 Hz | 0.01 Hz | 0.1 Hz | 0.01 Hz | 0.1 Hz | 0.01 Hz | 0.1 Hz | 0.01 Hz |
PC Software Windows® | Yes | Yes | Yes | Yes | Yes | Yes | Yes | Yes |
Number of supported crystals | 2 | 2 | 2 | 2 | 2 | 2 | 2 | 2 |
Built-In oscillator | Yes – One Channel * | Yes – One Channel * | Yes – One Channel * | Yes – One Channel * | Yes – One Channel * | Yes – One Channel * | 6Yes – One Channel * | Yes – One Channel * |
External oscillator support | Yes – Two Channels | Yes – Two Channels | Yes – Two Channels | Yes – Two Channels | Yes – Two Channels | Yes – Two Channels | Yes – Two Channels | Yes – Two Channels |
Shutter control | No | No | No | No | No | No | No | No |
* Two Built-In oscilators possible on request