Magnetron Power Supplies
- DC Magnetron Power Supplies
- PulseDC Magnetron Power Supplies
- RF Magnetron Power Supplies
- RF Matching Boxes
DC Magnetron Power Supply
The PPS DC Magnetron Power Supplies are versatile dual DC source power supplies for R&D coating & cleaning applications. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. The efficient glow discharge head used together with air as the process gas gives excellent plasma/ion cleaning of substrates and other critical parts such as TEM grids with the glow discharge.
The PPS series – except different interface configurations – comes in several main combinations: standard resolution with accuracy of single Watts, Voltage and mA Current, and high resolution in accuracy of 0,1 Watts, Voltage and mA Current and with different power range.
PPS DC Power Supplies comes in 6 versions:
PPS500D-2-S | PPS500D-2-H | PPS500D-4-S | PPS500D-4-H | PPS1500D-2 | PPS1500-4 | |
Output Power | 500W | 500.0W | 500W | 500.0W | 1500W | 1500W |
Output Voltage | 1000V | 1000.0V | 1000V | 1000.0V | 1000V | 1000V |
Output Current | 1000mA | 999.9mA | 1000mA | 999.9mA | 3000mA | 3000mA |
Mode of operation | DC | DC | DC | DC | DC | DC |
Communication Interface | I/O, RS-232, EthernetIP | I/O, RS-232, EthernetIP | I/O, RS-485, EthernetIP | I/O, RS-485, EthernetIP | I/O, RS-232, EthernetIP | I/O, RS-485, EthernetIP |
* Reffer to Technical Data of particular product for details
PulseDC Magnetron Power Supply
The PPS Pulse DC Magnetron Power Supplies are versatile dual source power supply combining DC and unipolar PulseDC operating modes available for R&D coating & cleaning applications. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. The PPS’s can be used as standalone table-top device or rack mounted.
Remote control is possible via RS232 or RS485 and LAN/Ethernet
PPS PulseDC Power Supplies comes in 4 versions:
PPS1500U-2-120 | PPS1500U-2-300 | PPS1500U-4-120 | PPS1500U-4-300 | |
Output Power | 1500W in DC mode, 1050W in Pulse Mode | 1500W in DC mode, 1050W in Pulse Mode | 1500W in DC mode, 1050W in Pulse Mode | 1500W in DC mode, 1050W in Pulse Mode |
Output Voltage | 1000V | 1000V | 1000V | 1000V |
Output Current | 3A | 3A | 3A | 3A |
Mode of operation | DC and Unipolar PulseDC | DC and Unipolar PulseDC | DC and Unipolar PulseDC | DC and Unipolar PulseDC |
Frequency of operation: | 10kHz – 120kHz | 10kHz – 300kHz | 10kHz – 120kHz | 10kHz – 300kHz |
Communication Interface | I/O, RS-232, EthernetIP | I/O, RS-232, EthernetIP | I/O, RS-485, EthernetIP | I/O, RS-485, EthernetIP |
* Reffer to Technical Data of particular product for details
* alternatively operation is also possible from two hot wires 3 phase systems, providing the voltage between them does not exceed more than 250 VAC
RF Magnetron Power Supply
The PPS R series are versatile source of RF power with the Compete RF Delivery System using leading edge solid state design throughout all power stages for R&D coating & cleaning applications. EDF build our units to last and have an outstanding track record, our service is quick, accessible, and dedicated to providing you with immediate results
RF Power Supplies comes in 6 main versions:
PPS100R | PPS300R | PPS600R | PPS1000R | PPS1200R | PPS2400R | |
Output Power | 100W | 300W | 600W | 1000W | 1200W | 2400W |
Basic RF frequency | 13.56 MHz | 13.56 MHz | 13.56 MHz | 13.56 MHz | 13.56 MHz | 13.56 MHz |
Cooling | Air | Air | Air | Air | Water | Water |
Interface |
Analog/Digital, RS-232, USB interfaces |
Analog/Digital, RS-232, USB interfaces | Analog/Digital, RS-232, USB interfaces | Analog/Digital, RS-232, USB interfaces | Analog/Digital, RS-232, USB interfaces | Analog/Digital, RS-232, USB interfaces |
Matching Box | Compatible with any* | Compatible with any* | Compatible with any* | Compatible with any* | Compatible with any* | Compatible with any* |
* fully automatic control with EDF’s Matching Networks
RF Matching Box
The PMB series Automatic Impedance Tuner (AIT) is designed to match the impedance of the plasma reactive load while maintaining 50 Ohms of its input for impedance to the RF Generator. The PMB is available in three power levels and does not require additional external controllers.
RF Power Supplies comes in 3 main versions:
PMB600 | PMB1200 | PMB2400 | |
RF Power Rating | up to 600W | up to 1200W | up to 2400W |
Basic RF frequency | 13.56 MHz | 13.56 MHz | 13.56 MHz |
Tuning Capacitor | Vacuum 5-500 pF/5 kV | Vacuum 5-500 pF/5 kV | Vacuum 25-250 pF/9 kV |
Load Capacitor |
Air 20 to 1720 pF/1.1 kV |
Air 20 to 1020 pF/1.5 kV | Vacuum 1500pF/2.4 kV |
Electrical | 110 – 240 VAC, 35VA | 110 – 240 VAC, 35VA | 110 – 240 VAC, 35VA |