PPS500D-2-S Magnetron Power Supply

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The PPS500D-2-S is a versatile dual source power supply for R&D coating & cleaning applications of 500W max power with with  accuracy of 1 mA,V and W only. It is excellent power source for low power R&D application. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. The efficient glow discharge head used together with air as the process gas gives excellent plasma/ion cleaning of substrates and other critical parts such as TEM grids. With the glow discharge, hydrocarbons or biological material can also be etched.

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Description

The PPS500D-2-S can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. The efficient glow discharge head used together with air as the process gas gives excellent plasma/ion cleaning of substrates and other critical parts such as TEM grids. With the glow discharge, hydrocarbons or biological material can also be etched.

The PPS500D-2-S also features a vacuum gauge interlock and can be used as a standalone table-top device or rack mounted and is only 2U total height.

Extremely stable output allows for operating the sources even at low powers (<2W), which makes this device unique in its class and ideal for low rate and precise coating applications.

Arc Detection and Suppression – guaranteed by fast response loop in less than 95ns.

The following table provides an overview of available DC Power Supply models:

PPS500D-2-S PPS500D-2-H 4PPS500D-4-S PPS500D-4-H PPS1500D-2 PPS1500-4
Output Power 500W 500.0W 500W 500.0W 1500W 1500W
Output Voltage 1000V 1000.0V 1000V 1000.0V 1000V 1000V
Output Current 1000mA 999.9mA 1000mA 999.9mA 3000mA 3000mA
Mode of operation DC DC DC DC DC DC
Communication Interface I/O, RS-232, EthernetIP I/O, RS-232, EthernetIP I/O, RS-485, EthernetIP I/O, RS-485, EthernetIP I/O, RS-232, EthernetIP I/O, RS-485, EthernetIP

* Reffer to Technical Data of particular product for details

Additional information

Memory:

12 GB GDDR5 @ 326 GB/s

Flash Memory:

8GB

HDR10 support

Yes

Content protection:

HDCP 2.2

Pliki do pobrania

PPS500D User Manual Rev1.0

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