Description
The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.
Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.
Henniker Plasma’s NEBULA range of low pressure plasma treatment systems are perfect for cleaning, activation, and deposition onto a wide range of materials. Key applications include surface preparation to improve bond adhesion and plasma polymerisation to produce hydrophilic or hydrophobic coatings.
NEBULA BASE MODEL |
NEBULA OPTIONS |
|
Enclosure dimensions | W 612mm x H 1875mm x L 852mm (+200mm on side for cables) | W 612mm x H 1875mm x L 852mm (+200mm on side for cables) |
Weight | ~100-120kg depending on model | ~100-120kg depending on model |
Chamber material | Stainless Steel | Stainless Steel |
Chamber form | Rectangular | Rectangular |
Chamber dimensions | 30L (300x300x365mm),
50L (300x300x560mm), 100L (400x400x625mm), 150L (400x600x625mm) |
30L (300x300x365mm),
50L (300x300x560mm), 100L (400x400x625mm), 150L (400x600x625mm) |
Removable parts carrier material | Aluminium/Stainless Steel | Aluminium/Stainless Steel |
Removable parts carrier form | Flat horizontal trays, vertical carriers, rotary drum | Flat horizontal trays, vertical carriers, rotary drum |
Power | 0-1000W, continuously variable output | 0-1000W, continuously variable output |
Frequency | 40kHz | 40kHz |
Interface | 15” Colour TFT, Windows10, PLC control | Unlimited steps/recipes with user access privileges |
Gas channels | 1 – 3 Digital Mass Flow Controllers | vapour dosing inlet |
Vent inlet | x1 | soft ventilation option |
Purge inlet | x1 | x1 |
Connections | 6mm compression | ¼” compression |
Pressure gauge | Pirani sensor | Pirani sensor |
Vacuum pump | 2-stage rotary* | others to suit application, e.g. dry pump |
Electrical | 380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz | 380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz |
Power cord | Suited to region | Suited to region |
Compliance | CE – ROHS – WEEE | CE – ROHS – WEEE |
*Suitable for use with air, oxygen and other non-corrosive gases