Vacuum Plasma Treatment Systems

The Henniker Plasma ‘HPT’ range of low pressure plasma treatment systems are microprocessor controlled benchtop devices that are ideal for routine laboratory, R&D and light industrial tasks. Due to their ease of use and reliability, they are the instrument of choice for many of the world’s leading companies and institutes, where they are used to activate materials in order to increase wettability and improve adhesion.

Each device includes an integrated pressure gauge and precision gas flow controller as well as a suitable vacuum pump, everything needed for operation. Simple recipes are stored via the intuitive touch screen control and are executed with a single button press and, because we do not use analogue timers or unreliable needle valves, process repeatability is guaranteed each and every time.

Henniker Plasma’s HPT plasma systems are perfect for surface cleaning, surface preparation and surface modification of a wide range of materials including metals, glass, polymers, ceramics, plastics and composites. Key applications include composites joining development, microfluidics PDMS bonding, microscope sample cleaning, optics cleaning, metals cleaning, biomedical applications, polymer science and medical device manufacture.

The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.

Accessories

These systems comes in 8 main versions: 

	HPT-100	HPT-200	HPT-300	HPT-500	NEBULA-30	NEBULA-50	NEBULA-100	NEBULA-150
Enclosure Dimensions [mm]	520 x 286 x 550	520 x 286 x 550	533 x 466 x 615	533 x 600 x 615	W 612mm x H 1875mm x L 852mm (+200mm on side for cables)	W 612mm x H 1875mm x L 852mm (+200mm on side for cables)	W 612mm x H 1875mm x L 852mm (+200mm on side for cables)	W 612mm x H 1875mm x L 852mm (+200mm on side for cables)
Weight	22 kg	23 kg	40 kg	45 kg	100 kg	107 kg	113 kg	120 kg
Chamber Form	Cylindrical	Cylindrical	Cylindrical in standard; Rectangular as option	Cylindrical in standard; Rectangular as option	Rectangular	Rectangular	Rectangular	Rectangular
Chamber Dimensions	100mm dia. x 280mm L	150mm dia. x 280mm L	200mm dia. x 320mm L	250mm dia. x 410mm L	300 x 300 x 365H mm	300 x 300 x 560H mm	400 x 400 x 625H mm	400 x 600 x 625H mm
Plasma power	100 W max	200 W max	250 W max	300 W max	1000 W max	1000 W max	1000 W max	1000 W max
Plasma frequency	40 kHz	40 kHz	40 kHz	40 kHz	40 kHz	40 kHz	40 kHz	40 kHz
Electrical	110 or 250AC, 50-60Hz,450VA ( including pump)*	110 or 250AC, 50-60Hz,450VA ( including pump)*	110 or 250AC, 50-60Hz,450VA ( including pump)*	110 or 250AC, 50-60Hz,450VA ( including pump)*	380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz	380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz	380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz	380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

 * Supply voltage and frequency has to be specified with order

The Henniker Plasma ‘HPT’ range of low pressure plasma treatment systems are microprocessor controlled benchtop devices that are ideal for routine laboratory, R&D and light industrial tasks. Due to their ease of use and reliability, they are the instrument of choice for many of the world’s leading companies and institutes, where they are used to activate materials in order to increase wettability and improve adhesion.

Each device includes an integrated pressure gauge and precision gas flow controller as well as a suitable vacuum pump, everything needed for operation. Simple recipes are stored via the intuitive touch screen control and are executed with a single button press and, because we do not use analogue timers or unreliable needle valves, process repeatability is guaranteed each and every time.

Henniker Plasma’s HPT plasma systems are perfect for surface cleaning, surface preparation and surface modification of a wide range of materials including metals, glass, polymers, ceramics, plastics and composites. Key applications include composites joining development, microfluidics PDMS bonding, microscope sample cleaning, optics cleaning, metals cleaning, biomedical applications, polymer science and medical device manufacture.

The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.

Accessories

These systems comes in 8 versions:

	HPT-100	HPT-200	HPT-300	HPT-500	NEBULA-30	NEBULA-50	NEBULA-100	NEBULA-150
Enclosure Dimensions [mm]	520 x 286 x 550	520 x 286 x 550	533 x 466 x 615	533 x 600 x 615	W 612mm x H 1875mm x L 852mm (+200mm on side for cables)	W 612mm x H 1875mm x L 852mm (+200mm on side for cables)	W 612mm x H 1875mm x L 852mm (+200mm on side for cables)	W 612mm x H 1875mm x L 852mm (+200mm on side for cables)
Weight	22 kg	23 kg	40 kg	45 kg	100 kg	107 kg	113 kg	120 kg
Chamber Form	Cylindrical	Cylindrical	Cylindrical in standard; Rectangular as option	Cylindrical in standard; Rectangular as option	Rectangular	Rectangular	Rectangular	Rectangular
Chamber Dimensions	100mm dia. x 280mm L	150mm dia. x 280mm L	200mm dia. x 320mm L	250mm dia. x 410mm L	300 x 300 x 365H mm	300 x 300 x 560H mm	400 x 400 x 625H mm	400 x 600 x 625H mm
Plasma power	100 W max	200 W max	250 W max	300 W max	1000 W max	1000 W max	1000 W max	1000 W max
Plasma frequency	40 kHz	40 kHz	40 kHz	40 kHz	40 kHz	40 kHz	40 kHz	40 kHz
Electrical	110 or 250AC, 50-60Hz,450VA ( including pump)*	110 or 250AC, 50-60Hz,450VA ( including pump)*	110 or 250AC, 50-60Hz,450VA ( including pump)*	110 or 250AC, 50-60Hz,450VA ( including pump)*	380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz	380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz	380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz	380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

* Supply voltage and frequency has to be specified with order