Nebula 150L SI Advanced Plasma Systems

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The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch.

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    Terms and Conditions
    Lead time 4-6 weeks


    Technical specifications
    ENCLOSURE
    DimensionsBase model: W 612mm x H 1875mm x L 852mm (+200mm on side for cables)
    Weight~100-120kg depending on model
    CHAMBER
    MaterialStainless Steel
    FormRectangular
    Dimensions150L – 400mm W x 400mm H x 625mm L
    REMOVABLE PARTS CARRIER
    MaterialAluminium/Stainless steel
    FormFlat horizontal trays, vertical carriers, rotary drum, user defined
    PLASMA POWER SUPPLY 
    Power0-1000W, continuously variable output
    Frequency50kHz
    PROCESS CONTROL
    Interface15” Colour TFT, Windows 10, PLC Control – Unlimited steps/recipes with user access privileges
    Gas channels1-3 Digital Mass Flow Controllers – monomer dosing inlet optional
    Vent inletx1
    Vent inlet optionssoft ventilation option
    Purge inletx1
    Connections6mm compression or 1/4 compression optional
    Pressure gaugePirani sensor
    Vacuum pump12 to 40 m3/hr pumping speed
    Vacuum pump options2-stage rotary pump (air/inert gas), PFPE rotary pump (oxygen compatible), dry pumps. All pumps include exhaust filter and connections
    SERVICES
    Electrical380-400 VAC/3~/N/PE, max current 16A/phase, 50Hz
    Power cordSuited to region
    ComplianceCE – UKCA – ROHS – WEEE
    **Henniker strive for continuous improvement and specifications are subject to change without notice


    Nebula 150l SI - single inlet


    Features:

    • 150L chamber volume
    • Precisely adjustable one gas flow controller with 1 sccm resolution
    • Horizontal, vertical and rotary drum parts tray options
    • Plasma polymerisation inlet
    • PLC control
    • Fully automated, recipe-driven processes


     

    They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

    Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.

    Henniker Plasma’s NEBULA range of low pressure plasma treatment systems are perfect for cleaning, activation, and deposition onto a wide range of materials. Key applications include surface preparation to improve bond adhesion and plasma polymerisation to produce hydrophilic or hydrophobic coatings. 

     Before plasma treatment

     After plasma treatment ​