Nebula 100L DI Advanced Plasma System
The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch.
| ENCLOSURE | |
| Dimensions | Base model: W 612mm x H 1875mm x L 852mm (+200mm on side for cables) |
| Weight | ~100-120kg depending on model |
| CHAMBER | |
| Material | Stainless Steel |
| Form | Rectangular |
| Dimensions | 100L – 400mm W x 400mm H x 625mm L |
| REMOVABLE PARTS CARRIER | |
| Material | Aluminium/Stainless steel |
| Form | Flat horizontal trays, vertical carriers, rotary drum, user defined |
| PLASMA POWER SUPPLY | |
| Power | 0-1000W, continuously variable output |
| Frequency | 50kHz |
| PROCESS CONTROL | |
| Interface | 15” Colour TFT, Windows 10, PLC Control – Unlimited steps/recipes with user access privileges |
| Gas channels | 1-3 Digital Mass Flow Controllers – monomer dosing inlet optional |
| Vent inlet | x1 |
| Vent inlet options | soft ventilation option |
| Purge inlet | x1 |
| Connections | 6mm compression or 1/4 compression optional |
| Pressure gauge | Pirani sensor |
| Vacuum pump | 12 to 40 m3/hr pumping speed |
| Vacuum pump options | 2-stage rotary pump (air/inert gas), PFPE rotary pump (oxygen compatible), dry pumps. All pumps include exhaust filter and connections |
| SERVICES | |
| Electrical | 380-400 VAC/3~/N/PE, max current 16A/phase, 50Hz |
| Power cord | Suited to region |
| Compliance | CE – UKCA – ROHS – WEEE |
| **Henniker strive for continuous improvement and specifications are subject to change without notice |
Nebula 100l DI - dual inlet
Features:
- 100L chamber volume
- 3 parts tray
- Precisely adjustable 2 gas flow controllers with 1 sccm resolution
- Horizontal, vertical and rotary drum parts tray options
- Plasma polymerisation inlet
- PLC control
- Fully automated, recipe-driven processes
They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.
Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.
Henniker Plasma’s NEBULA range of low pressure plasma treatment systems are perfect for cleaning, activation, and deposition onto a wide range of materials. Key applications include surface preparation to improve bond adhesion and plasma polymerisation to produce hydrophilic or hydrophobic coatings.
Before plasma treatment
After plasma treatment