QPM60-6C - Thin film thickness and rate controller

Enclosure Dimensions [mm]

520 x 286 x 550 – 2U standard

Weight [netto]

1.6 kg

User Interface

4.3” Colour TFT and rotary encoder

Communication interface

RS232 and EthernetIP *

Inputs channels

6

Resolution

0.01 Hz **

Thickness resolution

0.012 A ( density = 1)

Hardware interfaces

D/A and RS232 interface fully compatible to SQM160:

6 programmable analogue outputs for rate,

4 digital inputs (5V); 4 relay outputs

thickness recording or power control ( via 4 x programmable BNC outputs )