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Vacuum Plasma Treatment Systems

HPT’s and NEBULA series

The Henniker Plasma ‘HPT’ range of low pressure plasma treatment systems are microprocessor controlled benchtop devices that are ideal for routine laboratory, R&D and light industrial tasks. Due to their ease of use and reliability, they are the instrument of choice for many of the world’s leading companies and institutes, where they are used to activate materials in order to increase wettability and improve adhesion.

Each device includes an integrated pressure gauge and precision gas flow controller as well as a suitable vacuum pump, everything needed for operation. Simple recipes are stored via the intuitive touch screen control and are executed with a single button press and, because we do not use analogue timers or unreliable needle valves, process repeatability is guaranteed each and every time.

Henniker Plasma’s HPT plasma systems are perfect for surface cleaning, surface preparation and surface modification of a wide range of materials including metals, glass, polymers, ceramics, plastics and composites. Key applications include composites joining development, microfluidics PDMS bonding, microscope sample cleaning, optics cleaning, metals cleaning, biomedical applications, polymer science and medical device manufacture.

The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.

These systems comes in 8 main versions:

HPT-100 HPT-200 HPT-300 HPT-500 NEBULA-30 NEBULA-50 NEBULA-100 NEBULA-150
Enclosure Dimensions [mm] 520 x 286 x 550 520 x 286 x 550  533 x 466 x 615 533 x 600 x 615

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

Weight 22 kg 23 kg 40 kg 45 kg 100 kg 107 kg 113 kg 120 kg
Chamber Form Cylindrical Cylindrical Cylindrical in standard;
Rectangular as option
Cylindrical in standard;
Rectangular as option

Rectangular

Rectangular

Rectangular

Rectangular

Chamber Dimensions 100mm dia. x 280mm L 150mm dia. x 280mm L 200mm dia. x 320mm L 250mm dia. x 410mm L 300 x 300 x 365H mm 300 x 300 x 560H mm 400 x 400 x 625H mm 400 x 600 x 625H mm
Plasma power 100 W max 200 W max 250 W max 300 W max 1000 W max 1000 W max 1000 W max 1000 W max
Plasma frequency 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz
Electrical 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)*

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

* Supply voltage and frequency has to be specified with order

HPT’s and NEBULA series

The Henniker Plasma ‘HPT’ range of low pressure plasma treatment systems are microprocessor controlled benchtop devices that are ideal for routine laboratory, R&D and light industrial tasks. Due to their ease of use and reliability, they are the instrument of choice for many of the world’s leading companies and institutes, where they are used to activate materials in order to increase wettability and improve adhesion.

Each device includes an integrated pressure gauge and precision gas flow controller as well as a suitable vacuum pump, everything needed for operation. Simple recipes are stored via the intuitive touch screen control and are executed with a single button press and, because we do not use analogue timers or unreliable needle valves, process repeatability is guaranteed each and every time.

Henniker Plasma’s HPT plasma systems are perfect for surface cleaning, surface preparation and surface modification of a wide range of materials including metals, glass, polymers, ceramics, plastics and composites. Key applications include composites joining development, microfluidics PDMS bonding, microscope sample cleaning, optics cleaning, metals cleaning, biomedical applications, polymer science and medical device manufacture.

The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.

Accessories

These systems comes in 8 versions:

HPT-100 HPT-200 HPT-300 HPT-500 NEBULA-30 NEBULA-50 NEBULA-100 NEBULA-150
Enclosure Dimensions [mm] 520 x 286 x 550 520 x 286 x 550  533 x 466 x 615 533 x 600 x 615

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

Weight 22 kg 23 kg 40 kg 45 kg 100 kg 107 kg 113 kg 120 kg
Chamber Form Cylindrical Cylindrical Cylindrical in standard;
Rectangular as option
Cylindrical in standard;
Rectangular as option

Rectangular

Rectangular

Rectangular

Rectangular

Chamber Dimensions 100mm dia. x 280mm L 150mm dia. x 280mm L 200mm dia. x 320mm L 250mm dia. x 410mm L 300 x 300 x 365H mm 300 x 300 x 560H mm 400 x 400 x 625H mm 400 x 600 x 625H mm
Plasma power 100 W max 200 W max 250 W max 300 W max 1000 W max 1000 W max 1000 W max 1000 W max
Plasma frequency 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz
Electrical 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)*

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

HPT’s and NEBULA series

The Henniker Plasma ‘HPT’ range of low pressure plasma treatment systems are microprocessor controlled benchtop devices that are ideal for routine laboratory, R&D and light industrial tasks. Due to their ease of use and reliability, they are the instrument of choice for many of the world’s leading companies and institutes, where they are used to activate materials in order to increase wettability and improve adhesion.

Each device includes an integrated pressure gauge and precision gas flow controller as well as a suitable vacuum pump, everything needed for operation. Simple recipes are stored via the intuitive touch screen control and are executed with a single button press and, because we do not use analogue timers or unreliable needle valves, process repeatability is guaranteed each and every time.

Henniker Plasma’s HPT plasma systems are perfect for surface cleaning, surface preparation and surface modification of a wide range of materials including metals, glass, polymers, ceramics, plastics and composites. Key applications include composites joining development, microfluidics PDMS bonding, microscope sample cleaning, optics cleaning, metals cleaning, biomedical applications, polymer science and medical device manufacture.

The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.

Accessories

These systems comes in 8 versions:

HPT-100 HPT-200 HPT-300 HPT-500 NEBULA-30 NEBULA-50 NEBULA-100 NEBULA-150
Enclosure Dimensions [mm] 520 x 286 x 550 520 x 286 x 550  533 x 466 x 615 533 x 600 x 615

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

W 612mm x H 1875mm x L 852mm (+200mm on side for cables)

Weight 22 kg 23 kg 40 kg 45 kg 100 kg 107 kg 113 kg 120 kg
Chamber Form Cylindrical Cylindrical Cylindrical in standard;
Rectangular as option
Cylindrical in standard;
Rectangular as option

Rectangular

Rectangular

Rectangular

Rectangular

Chamber Dimensions 100mm dia. x 280mm L 150mm dia. x 280mm L 200mm dia. x 320mm L 250mm dia. x 410mm L 300 x 300 x 365H mm 300 x 300 x 560H mm 400 x 400 x 625H mm 400 x 600 x 625H mm
Plasma power 100 W max 200 W max 250 W max 300 W max 1000 W max 1000 W max 1000 W max 1000 W max
Plasma frequency 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz 40 kHz
Electrical 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)* 110 or 250AC, 50-60Hz,450VA ( including pump)*

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz

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