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Thin Film Thickness / Rate Measurement

QPM60 – TFT THIN FILM THICKNESS AND RATE MONITOR / CONTROLLER

As alternative to PC based monitor, EDF offers rack mounted monitor. The QPM60 multi channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control.

Accessories

QPM comes in 3 versions:

QPM60-2C QPM60-4C QPM60-6C
Enclosure Dimensions [mm] 520 x 286 x 550 – 2U standard 520 x 286 x 550 – 2U standard 520 x 286 x 550 – 2U standard
Weight [netto] 1.6 kg 1.6 kg 1.6 kg
User Interface 4.3” Colour TFT and rotary encoder 4.3” Colour TFT and rotary encoder 4.3” Colour TFT and rotary encoder
Communication interface RS232 and EthernetIP * RS232 and EthernetIP * RS232 and EthernetIP *
Inputs channels 2 4 6
Resolution 0.01 Hz ** 0.01 Hz ** 0.01 Hz **
Thickness resolution 0.012 A ( density = 1) 0.012 A ( density = 1) 0.012 A ( density = 1)
Hardware interfaces D/A and RS232 interface fully compatible to SQM160:
6 programmable analogue outputs for rate,
4 digital inputs (5V); 4 relay outputs
thickness recording or power control ( via 4 x programmable BNC outputs )
D/A and RS232 interface fully compatible to SQM160:
6 programmable analogue outputs for rate,
4 digital inputs (5V); 4 relay outputs
thickness recording or power control ( via 4 x programmable BNC outputs )
D/A and RS232 interface fully compatible to SQM160:
6 programmable analogue outputs for rate,
4 digital inputs (5V); 4 relay outputs
thickness recording or power control ( via 4 x programmable BNC outputs )

* Ethernet for future firmware development

** each channel requires external oscillator model QM20-EO

QM20 – PC BASED THIN FILM THICKNESS AND RATE MONITOR

 

EDFelectronics offers so called PC based thickness rate monitors QM20 series, which combine the functionality of an oscillator and measurement converter. All monitors are installed between sensor head and superior control unit (e.g. PC or PLC) on atmosphere. The transducer delivers information about quartz frequency, rate, thickness and crystal health via a serial line like RS232, RS485, USB or PoE QM20 series are available with standard and high resolution.

Accessories

This QM20 comes in 8 versions:

QM20-2-S QM20-2-H QM20-4-S QM20-4-H QM20-U-S QM20-U-H QM20-E-S QM20-E-H
Interface RS-232 RS-232 RS-232 RS-232 RS-232 RS-232 RS-232 RS-232
Resolution (@ 6MHz) 0.1 Hz 0.01 Hz 0.1 Hz 0.01 Hz 0.1 Hz 0.01 Hz 0.1 Hz 0.01 Hz
PC Software Windows® Yes Yes Yes Yes Yes Yes Yes Yes
Number of supported crystals 2 2 2 2 2 2 2 2
Built-In oscillator Yes – One Channel * Yes – One Channel * Yes – One Channel * Yes – One Channel * Yes – One Channel * Yes – One Channel * 6Yes – One Channel * Yes – One Channel *
External oscillator support Yes – Two Channels Yes – Two Channels Yes – Two Channels Yes – Two Channels Yes – Two Channels Yes – Two Channels Yes – Two Channels Yes – Two Channels
Shutter control No No No No No No No No

* Two Built-In oscilators possible on request

 

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