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Magnetron Power Supplies

DC Magnetron Power Supply

 

The PPS DC Magnetron Power Supplies are versatile dual DC source power supplies for R&D coating & cleaning applications. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. The efficient glow discharge head used together with air as the process gas gives excellent plasma/ion cleaning of substrates and other critical parts such as TEM grids with the glow discharge.

The PPS series – except different interface configurations – comes in several main combinations: standard resolution with accuracy of single Watts, Voltage and mA Current, and high resolution in accuracy of 0,1 Watts, Voltage and mA Current and with different power range.

Accessories

PPS DC Power Supplies comes in 6 versions:

PPS500D-2-S PPS500D-2-H PPS500D-4-S PPS500D-4-H PPS1500D-2 PPS1500-4
Output Power 500W 500.0W 500W 500.0W 1500W 1500W
Output Voltage 1000V 1000.0V 1000V 1000.0V 1000V 1000V
Output Current 1000mA 999.9mA 1000mA 999.9mA 3000mA 3000mA
Mode of operation DC DC DC DC DC DC
Communication Interface I/O, RS-232, EthernetIP I/O, RS-232, EthernetIP I/O, RS-485, EthernetIP I/O, RS-485, EthernetIP I/O, RS-232, EthernetIP I/O, RS-485, EthernetIP

* Reffer to Technical Data of particular product for details

PulseDC Magnetron Power Supply

 

The PPS Pulse DC Magnetron Power Supplies are versatile dual source power supply combining DC and unipolar PulseDC operating modes available for R&D coating & cleaning applications. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. The PPS’s can be used as standalone table-top device or rack mounted.

Remote control is possible via RS232 or RS485 and LAN/Ethernet

Accessories

PPS PulseDC Power Supplies comes in 4 versions:

PPS1500U-2-120 PPS1500U-2-300 PPS1500U-4-120 PPS1500U-4-300
Output Power 1500W in DC mode, 1050W in Pulse Mode 1500W in DC mode, 1050W in Pulse Mode 1500W in DC mode, 1050W in Pulse Mode 1500W in DC mode, 1050W in Pulse Mode
Output Voltage 1000V 1000V 1000V 1000V
Output Current 3A 3A 3A 3A
Mode of operation DC and Unipolar PulseDC DC and Unipolar PulseDC DC and Unipolar PulseDC DC and Unipolar PulseDC
Frequency of operation: 10kHz – 120kHz 10kHz – 300kHz 10kHz – 120kHz 10kHz – 300kHz
Communication Interface I/O, RS-232, EthernetIP I/O, RS-232, EthernetIP I/O, RS-485, EthernetIP I/O, RS-485, EthernetIP

* Reffer to Technical Data of particular product for details

* alternatively operation is also possible from two hot wires 3 phase systems, providing the voltage between them does not exceed more than 250 VAC

RF Magnetron Power Supply

 

The PPS R series are versatile source of RF power with the Compete RF Delivery System using leading edge solid state design throughout all power stages for R&D coating & cleaning applications. EDF build our units to last and have an outstanding track record, our service is quick, accessible, and dedicated to providing you with immediate results

 

 

Accessories

RF Power Supplies comes in 6 main versions:

PPS100R PPS300R PPS600R PPS1000R PPS1200R PPS2400R
Output Power 100W 300W 600W 1000W 1200W 2400W
Basic RF frequency 13.56 MHz 13.56 MHz 13.56 MHz 13.56 MHz 13.56 MHz 13.56 MHz
Cooling Air Air Air Air Water Water
Interface

Analog/Digital, RS-232, USB interfaces

Analog/Digital, RS-232, USB interfaces Analog/Digital, RS-232, USB interfaces Analog/Digital, RS-232, USB interfaces Analog/Digital, RS-232, USB interfaces Analog/Digital, RS-232, USB interfaces
Matching Box Compatible with any* Compatible with any* Compatible with any* Compatible with any* Compatible with any* Compatible with any*

* fully automatic control with EDF’s Matching Networks

RF Matching Box

 

The PMB series Automatic Impedance Tuner (AIT) is designed to match the impedance of the plasma reactive load while maintaining 50 Ohms of its input for impedance to the RF Generator. The PMB is available in three power levels and does not require additional external controllers.

Accessories

RF Power Supplies comes in 3 main versions:

PMB600 PMB1200 PMB2400
RF Power Rating up to 600W up to 1200W up to 2400W
Basic RF frequency 13.56 MHz 13.56 MHz 13.56 MHz
Tuning Capacitor Vacuum 5-500 pF/5 kV Vacuum 5-500 pF/5 kV Vacuum 25-250 pF/9 kV
Load Capacitor

Air 20 to 1720 pF/1.1 kV

Air 20 to 1020 pF/1.5 kV Vacuum 1500pF/2.4 kV
Electrical 110 – 240 VAC, 35VA 110 – 240 VAC, 35VA 110 – 240 VAC, 35VA
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