Description
QPM60-4C is rack mounted multi channel thin film monitor used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control.
Two sensor inputs are featuring high resolution measurement of 0.01 Hz and up to 10 Hz sampling rate. Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units.
Sensor inputs can be assigned to different materials, configured for dual sensors or averaged using individual weights. Four relay outputs allow the QPM60 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/ stop the layer and zero readings.
Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units.
The following table provides an overview of available QPM monitors to compare:
| QPM60-2C | QPM60-4C | QPM60-6C | |
| Enclosure Dimensions [mm] | 88 x 252.6 x 264 – 2U standard | 88 x 252.6 x 264 – 2U standard | 88 x 252.6 x 264 – 2U standard |
| Weight [netto] | 1.6 kg | 1.6 kg | 1.6 kg |
| User Interface | 4.3” Colour TFT and rotary encoder | 4.3” Colour TFT and rotary encoder | 4.3” Colour TFT and rotary encoder |
| Communication interface | RS232 and EthernetIP * | RS232 and EthernetIP * | RS232 and EthernetIP * |
| Inputs channels | 2 | 4 | 6 |
| Resolution | 0.01 Hz ** | 0.01 Hz ** | 0.01 Hz ** |
| Thickness resolution | 0.012 A ( density = 1) | 0.012 A ( density = 1) | 0.012 A ( density = 1) |
| Hardware interfaces | D/A and RS232 interface fully compatible to SQM160: 6 programmable analogue outputs for rate, 4 digital inputs (5V); 4 relay outputs thickness recording or power control ( via 4 x programmable BNC outputs ) |
D/A and RS232 interface fully compatible to SQM160: 6 programmable analogue outputs for rate, 4 digital inputs (5V); 4 relay outputs thickness recording or power control ( via 4 x programmable BNC outputs ) |
D/A and RS232 interface fully compatible to SQM160: 6 programmable analogue outputs for rate, 4 digital inputs (5V); 4 relay outputs thickness recording or power control ( via 4 x programmable BNC outputs ) |
* Ethernet for future firmware development
** each channel requires external oscillator model QM20-EO
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